Step | Shelf temp (°C) | Chamber pressure (µbar) | Step time (HH:MM) |
---|
1. Loading | 5 | N/A | N/A |
2. Freezing ramp | −40 | N/A | 2:00 |
3. Freezing hold | −40 | N/A | 4:00 |
4. Evacuation | −40 | SP1-SP3 (Table 3) | N/A |
5. Sublimation ramp | 0 | SP1-SP3 (Table 3) | 1:10 |
6. Sublimation hold | 0 | SP1-SP3 (Table 3) | SP1-SP3 (Table 3) |